@conference{59616,
  author = {Joseph Tedesco and Nadine Gergel-Hackett and Laurie Stephey and Christina Hacker and Curt Richter},
  title = {Advanced Capacitance Metrology for Nanoscale Device Characterization},
  year = {2010},
  month = {2010-04-29},
  publisher = {Posters and Presentations (CD), McLean, VA},
  language = {en},
}