@conference{58751, author = {Quandou Wang}, title = {A Simple Method to Improve Etching Uniformity when Making Phase Type CGHs on a Thick Glass Substrate}, year = {2010}, month = {2010-06-13}, publisher = {OSA Digest Series, Jackson Hole, WY}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905044}, language = {en}, }