@misc{58361,
  author = {David Seiler},
  title = {Metrology, Nanocharacterization and Instrumentation for Emerging Nanotechnology and Nanoelectronics: Electrical and Optical Characterization},
  year = {2007},
  month = {2007-12-09},
  publisher = {Metrology, Nanocharacterization, and Instrumentation for Emerging Nanotechnology and Nanoelectronics},
  language = {en},
}