@article{57436,
  author = {Joseph Woicik and D. Giubertoni and G. Pepponi and S. Gennaro and M. Bersani and M. and S. and M. Kah and K. and R. Doherty and M. and F. Meirer and C. Streli and P. Pianetta},
  title = {Deactivation of Sub-Melt Laser Annealed Arsenic Ultra Shallow Junctions in Silicon During Subsequent Thermal Treatment},
  year = {2010},
  number = {28},
  month = {2010-05-04},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}