@conference{56816,
  author = {Ndubuisi Orji and Ronald Dixson and B Bunday and J Allgair},
  title = {Towards Accurate Feature Shape Metrology},
  year = {2008},
  number = {6922},
  month = {2008-03-22},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXII
, San Jose, CA},
  language = {en},
}