@article{56721,
  author = {John Dagata and Natalia Farkas and R Ramsier},
  title = {High-voltage Nanoimprint Lithography of Refractory Metal Film},
  year = {2010},
  number = {10},
  month = {2010-07-01},
  publisher = {Journal of Nanoscience and Nanotechnology},
  language = {en},
}