@misc{56591,
  author = {Janet Cassard and Richard Allen and Craig McGray and Jon Geist},
  title = {MEMS Young's Modulus and Step Height Measurements with Round Robin Results},
  year = {2010},
  number = {115},
  month = {2010-09-30},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904949},
  language = {en},
}