@conference{5556,
  author = {Steven Grantham and Charles Tarrio},
  title = {A Novel Wafer-plane Dosimeter for EUV Lithography},
  year = {2009},
  number = {1173},
  month = {2009-11-01},
  publisher = {2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY},
  language = {en},
}