@article{53186,
  author = {Joshua Pomeroy and L Ratliff and John Gillaspy and Sasa Bajt},
  title = {Potential Energy Sputtering of EUVL Materials},
  year = {2006},
  number = {PM149},
  month = {2006-02-23},
  publisher = {SPIE},
  language = {en},
}