@article{52316, author = {N Savage and S Roberson and John Gillen and Michael Tarlov and Stephen Semancik}, title = {Thermolithographic Patterning of Sol-Gel Metal Oxides on Micro hot plate Sensing Arrays Using Organosilanes}, year = {2003}, number = {75}, month = {2003-09-01}, publisher = {Analytical Chemistry}, language = {en}, }