@misc{517416, author = {Hao Zhang and Daniel Ott and Jun-Feng Song and D Ott and Wei Chu}, title = {A simple and fast spline filtering algorithm for surface metrology}, year = {2015}, month = {2015-07-14 00:07:00}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918312}, doi = {https://doi.org/10.6028/jres.120.010}, language = {en}, }