@article{51641, author = {C Kalnas and David Read and J Jones and G Was}, title = {Structure and Mechanical Properties of Al Thin Films Synthesized by Electron Beam Evaporation and Ion Beam Assisted Deposition}, year = {2010}, month = {2010-10-04}, publisher = {Thin Solid Films}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851192}, language = {en}, }