@misc{49391,
  author = {Ravikiran Attota},
  title = {Nanoscale Measurements With the TSOM Optical Method},
  year = {2010},
  month = {2010-01-04},
  publisher = {Other, National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904673},
  language = {en},
}