@book{48716,
  author = {David Seiler and Alain Diebold and Robert McDonald and C Garner and Dan Herr and Rajinder Khosla and Erik Secula},
  title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2007},
  year = {2007},
  number = {931},
  month = {2007-09-30},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}