@book{48701,
  author = {David Seiler and Alain Diebold and Thomas Shaffner and Robert McDonald and Stefan Zollner and Rajinder Khosla and Erik Secula},
  title = {Characterization and Metrology for ULSI Technology: 2003},
  year = {2003},
  number = {683},
  month = {2003-09-30},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}