@conference{48671, author = {Thiago Cobu and Robert Berg and John Wright and Michael Moldover}, title = {Accurate Measurements of Process Gas Flow with Laminar Flow Meters}, year = {2010}, month = {2010-10-15}, publisher = {15th Flow Measurement Conference (FLOMEKO), Taipei, -1}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906313}, language = {en}, }