@conference{4791,
  author = {Lin You and Jungjoon Ahn and Emily Hitz and Jonathon Michelson and Yaw Obeng and Joseph Kopanski},
  title = {Electromagnetic Field Test Structure Chip for Back End of the Line Metrology},
  year = {2015},
  month = {2015-03-23},
  publisher = {Proceedings of the 28th IEEE International Conference on Microelectronic Test Structures, Phoenix, AZ},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918005},
  language = {en},
}