@conference{4741, author = {Erik Secula and David Seiler}, title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2015}, year = {2015}, month = {2015-04-14}, publisher = {Frontiers of Characterization and Metrology for Nanoelectronics: 2015, Dresden, -1}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918591}, language = {en}, }