@article{4651,
  author = {Michael Postek and Andras Vladar},
  title = {Modeling for Accurate Dimensional Scanning Electron Microscope Metrology: Then and Now},
  year = {2011},
  number = {33},
  month = {2011-07-20},
  publisher = {Scanning},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908153},
  language = {en},
}