@article{46386,
  author = {Konrad Rykaczewski and Owen Hildreth and Ching Wong and Andrei Fedorov and John Scott},
  title = {Directed 2D-to-3D pattern transfer method for controlled fabrication of topologically complex three- dimensional nanostructures in silicon},
  year = {2011},
  number = {23},
  month = {2011-02-01},
  publisher = {Advanced Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906590},
  language = {en},
}