@misc{4571, author = {Liangchun Yu and Kin Cheung and Vinayak Tilak and Greg Dunne and Kevin Matocha and Jason Campbell and John Suehle and Kuang Sheng}, title = {Wafer-level Hall Measurement on SiC MOSFET}, year = {2009}, month = {2009-10-16}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907098}, language = {en}, }