@inbook{44241, author = {Jan Obrzut and Bernd Schumacher and Heinz-Gunter and Petra Spitzer}, title = {Springer Handbook of Metrology and Testing, Electrical Properties}, year = {2011}, month = {2011-08-01}, publisher = {Springer Handbook Handbook of Metrology and Testing, Springer, Heidelberg, -1}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906744}, language = {en}, }