@conference{42246,
  author = {Ronald Dixson and Ndubuisi Orji and James Potzick and Joseph Fu and Michael Cresswell and Richard Allen and S Smith and Anthony Walton},
  title = {Photomask Applications of Traceable Atomic Force Microscope Dimensional Metrology at NIST},
  year = {2007},
  number = {6730},
  month = {2007-10-01},
  publisher = {Proceedings of SPIE, Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823242},
  language = {en},
}