@conference{42221,
  author = {John Villarrubia and Ronald Dixson and Andras Vladar},
  title = {Proximity-associated errors in contour metrology},
  year = {2010},
  number = {7638},
  month = {2010-03-31},
  publisher = {Proc. SPIE Vol. 7638, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905141},
  language = {en},
}