@conference{42206,
  author = {Ronald Dixson and Ndubuisi Orji and Craig McGray and Jon Geist},
  title = {Traceable Calibration of a Critical Dimension Atomic Force Microscope},
  year = {2011},
  number = {8036},
  month = {2011-06-06},
  publisher = {Proceedings of SPIE, Vol. 8036, Orlando, FL},
  language = {en},
}