@conference{42156,
  author = {Ndubuisi Orji and Ronald Dixson and Andras Vladar and Michael Postek},
  title = {Strategies for Nanoscale Contour Metrology using Critical Dimension Atomic Force Microscopy},
  year = {2011},
  number = {8105},
  month = {2011-09-30},
  publisher = {SPIE NanoScience   Engineering: Instrumentation, Metrology, and Standards for Nanomanufacturing, 
Optics, and Semiconductors V, San Diego, CA},
  doi = {https://doi.org/10.1117/12.894416},
  language = {en},
}