@article{42146,
  author = {Ronald Dixson and Donald Chernoff and Shihua Wang and Theodore Vorburger and Siew-Leng Tan and Ndubuisi Orji and Joseph Fu},
  title = {Multi-laboratory Comparison of Traceable Atomic Force Microscope Measurements of 70 nm Grating Pitch},
  year = {2011},
  number = { 10},
  month = {2011-03-08},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906777},
  language = {en},
}