@article{4156,
  author = {Frank DelRio and Robert Cook and Brad Boyce},
  title = {Fracture strength of micro- and nano-scale silicon components},
  year = {2015},
  month = {2015-05-13},
  publisher = {Applied Physics Reviews},
  doi = {https://doi.org/10.1063/1.4919540},
  language = {en},
}