@article{40791,
  author = {Charles Tarrio and Steven Grantham and Shannon Hill and Nadir Faradzhev and Lee Richter and Chester Knurek and Thomas Lucatorto},
  title = {A synchrotron beamline for extreme-ultraviolet photoresist testing},
  year = {2011},
  number = {82},
  month = {2011-09-30},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908231},
  language = {en},
}