@conference{39641,
  author = {Thomas Germer and Martin Foldyna and Brent Bergner},
  title = {Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture},
  year = {2011},
  number = {7971},
  month = {2011-04-20},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXV, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908372},
  language = {en},
}