@conference{39636,
  author = {Thomas Germer and Heather Patrick and Ronald Dixson},
  title = {A Traceable Scatterometry Measurement of a Silicon Line Grating},
  year = {2011},
  number = {1395},
  month = {2011-05-26},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908506},
  language = {en},
}