@conference{39196,
  author = {Richard Silver and Nien Zhang and Bryan Barnes and Hui Zhou and Jing Qin and Ronald Dixson},
  title = {Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy},
  year = {2011},
  number = {7971},
  month = {2011-04-18},
  publisher = {Metrology Inspection and Process Control, San Jose, CA},
  language = {en},
}