@conference{39191,
  author = {Ronald Dixson and Ndubuisi Orji and Joseph Fu and Thomas Renegar and Xiaoyu Zheng and Theodore Vorburger and Albert Hilton and Marc Cangemi and Lei Chen and Michael Hernandez and Russell Hajdaj and Michael Bishop and Aaron Cordes},
  title = {Reference Metrology in a Research Fab: The NIST Clean Calibrations Thrust},
  year = {2009},
  number = {7272},
  month = {2009-04-12},
  publisher = {SPIE Proceedings Vol. 7272, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902187},
  language = {en},
}