@conference{39116,
  author = {Richard Silver and Bryan Barnes and Hui Zhou and Nien Zhang and Ronald Dixson},
  title = {Angle-resolved Optical Metrology using Multi-Technique Nested Uncertainties},
  year = {2009},
  number = {7390},
  month = {2009-08-15},
  publisher = {SPIE Proc. Optical Metrology
, Munich, -1},
  language = {en},
}