@article{39081,
  author = {Bryan Barnes and Ravikiran Attota and Richard Quintanilha and Martin Sohn and Richard Silver},
  title = {Characterizing a Scatterfield Optical Platform for Semiconductor Metrology},
  year = {2010},
  number = {22},
  month = {2010-12-21},
  publisher = {Measurement Science & Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905931},
  language = {en},
}