@conference{39076,
  author = {Richard Quintanilha and Martin Sohn and Bryan Barnes and Richard Silver},
  title = {Sub-50 nm measurements using a 193 nm angle-resolved scatterfield microscope},
  year = {2010},
  number = {76381},
  month = {2010-04-01},
  publisher = {Proceeding of SPIE Metrology, Inspection,and Process Control for Microlithography XXIV, San Jose, CA},
  language = {en},
}