@conference{39071, author = {Bryan Barnes and Richard Quintanilha and Martin Sohn and Hui Zhou and Richard Silver}, title = {Optical illumination optimization for patterned defect inspection}, year = {2011}, number = {7971}, month = {2011-04-20}, publisher = {SPIE Advanced Lithography, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908276}, language = {en}, }