@conference{38936,
  author = {Richard Silver and Bryan Barnes and Martin Sohn and Richard Quintanilha and Hui Zhou and Chris Deeb and Mark Johnson and Milton Goodwin and Dilip Patel},
  title = {The Limits and Extensibility of Optical Patterned Defect Inspection},
  year = {2010},
  number = {7638},
  month = {2010-04-01},
  publisher = {7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA},
  language = {en},
}