@article{38731,
  author = {Soo Kim and Daniel Josell and Thomas Moffat},
  title = {Cationic Surfactants for the Control of Overfill Bumps in Cu Superfilling},
  year = {2006},
  month = {2006-10-10},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}