@article{38636,
  author = {Thomas Moffat and Daniel Wheeler and W Huber and Daniel Josell},
  title = {Superconformal Electrodeposition of Copper in 500-90 nm Features},
  year = {2000},
  number = {147},
  month = {2000-12-01},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852990},
  language = {en},
}