@conference{37611,
  author = {Bryan Barnes and Martin Sohn and Francois Goasmat and Hui Zhou and Richard Silver and Abraham Arceo},
  title = {Scatterfield Microscopy of 22 nm Node Patterned Defects using Visible and DUV Light},
  year = {2012},
  number = {8324},
  month = {2012-04-04},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910963},
  language = {en},
}