@conference{37356,
  author = {Gregg Gallatin and Patrick Naulleau and Robert Brainard},
  title = {Modeling the effects of acid amplifiers on photoresist stochastics},
  year = {2012},
  number = {8322},
  month = {2012-03-23},
  publisher = {Proceedings of SPIE, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910777},
  language = {en},
}