@conference{37286, author = {Ravikiran Attota and Michael Stocker and Richard Silver and Nathanael Heckert and Hui Zhou and Richard Kasica and Lei Chen and Ronald Dixson and Ndubuisi Orji and Bryan Barnes and Peter Lipscomb}, title = {Through-focus Scanning and Scatterfield Optical Methods for Advanced Overlay Target Analysis}, year = {2008}, number = {33}, month = {2008-09-01}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXIII, John A. Allgair, Editor, San Jose, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902294}, language = {en}, }