@article{37281,
  author = {Ravikiran Attota and Richard Silver and Ronald Dixson},
  title = {Line Width Measurement Technique Using Through-Focus Optical Images},
  year = {2008},
  number = {47},
  month = {2008-01-01},
  publisher = {Applied Optics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823239},
  language = {en},
}