@conference{37271,
  author = {Ravikiran Attota and Richard Silver and Bryan Barnes},
  title = {Optical Through-Focus Technique that Differentiates Small Changes in Line Width, Line Height and Sidewall Angle for CD, Overlay, and Defect Metrology Applications},
  year = {2008},
  number = {6922},
  month = {2008-04-16},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXII, John Allgair, Editor, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824634},
  language = {en},
}