@conference{37266,
  author = {Ravikiran Attota and Richard Silver and M Bishop and Ronald Dixson},
  title = {Optical Critical Dimension Measurement and Illumination Analysis using the Through-focus Focus Metric},
  year = {2006},
  number = {6152},
  month = {2006-03-24},
  publisher = {Proceedings of SPIE, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823215},
  language = {en},
}