@conference{37176,
  author = {Ndubuisi Orji and Ronald Dixson and Andras Vladar and Bin Ming and Michael Postek},
  title = {Contour Metrology using Critical Dimension Atomic Force Microscopy},
  year = {2012},
  month = {2012-04-09},
  publisher = {Proc. SPIE Metrology, Inspection, and Process Control for Microlithography XXVI, San Jose, CA},
  doi = {https://doi.org/10.1117/12.918056},
  language = {en},
}