@conference{37091,
  author = {Ravikiran Attota and Shrawan Singhal and Sreenivasan S.V.},
  title = {Residual Layer Thickness Control and Metrology in Jet and Flash Imprint Lithography},
  year = {2012},
  month = {2012-04-10},
  publisher = {Metrology Inspection and Process Control, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910872},
  language = {en},
}