@article{37076,
  author = {Ravikiran Attota and Richard Silver},
  title = {Nanometrology Using Through-Focus Scanning Optical Microscopy Method},
  year = {2011},
  month = {2011-12-21},
  publisher = {Measurement Science & Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905395},
  language = {en},
}