@conference{37066,
  author = {Ravikiran Attota},
  title = {TSOM Method for Nanoelectronics Dimensional Metrology},
  year = {2011},
  month = {2011-11-18},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics
, Grenoble, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908623},
  language = {en},
}